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- Title
Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation.
- Authors
Park, Kyungjin; Kim, Kanghyun; Lee, Seung Chul; Lim, Geunbae; Kim, Jong Hyun
- Abstract
In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the exposure technology, material properties, and light sources. A few research groups have sought to create microstructures on curved substrates. We created tilted microstructures of various angles by simply deforming the substrate from 3D to two-dimensional (2D). The microstructural inclination angles changed depending on the angles of the support at particular positions. We used convex, concave, and S-shaped supports to fabricate microstructures with high aspect ratios (1:11) and high inclination angles (to 79°). The method is simple and can be extended to various 3D microstructural applications; for example, the fabrication of microarrays for optical components, and tilted micro/nanochannels for biological applications.
- Subjects
POLYMER structure; MICROFABRICATION; SYNCHROTRONS; X-ray lithography; MICROARRAY technology; THREE-dimensional imaging
- Publication
Materials (1996-1944), 2018, Vol 11, Issue 8, p1460
- ISSN
1996-1944
- Publication type
Article
- DOI
10.3390/ma11081460