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- Title
Some Features of the Ion-Beam Mixing during Simultaneous Ion Implantation and Metal Deposition.
- Authors
Pogrebnyak, A. D.; Martynenko, V. A.; Mikhalev, A. D.; Shablya, V. T.; Yanovskiı, V. P.
- Abstract
Experimental results on the ion implantation of Ta and Cu ions into an Al substrate, accompanied by the deposition of these ions in the form of a surface coating are reported. The coatings composed of the implant elements exhibit a complicated structure and lead to an increase in the microhardness, adhesion properties, and corrosion resistance of the substrate. An analysis of data on the energy distribution of secondary ions shows that the surface layer of ion-implanted substrates contains intermetallic phases.
- Subjects
ION bombardment; METAL ions
- Publication
Technical Physics Letters, 2001, Vol 27, Issue 7, p615
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/1.1388962