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- Title
Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing.
- Authors
Zheng, Zhen; Chang, Long; Nekrashevich, Ivan; Ruchhoeft, Paul; Khizroev, Sakhrat; Litvinov, Dmitri
- Abstract
We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where close packed square magnetic bits may improve its recording performance. The process and results of generating close packed square patterns by self-limiting low-energy glow-discharge are investigated. Dense magnetic arrays formed by electrochemical deposition of nickel over self-limiting formed molds are demonstrated.
- Subjects
NANOMAGNETICS; FABRICATION (Manufacturing); GLOW discharges; POLYMETHYLMETHACRYLATE; ELECTRON beam lithography; MAGNETIC recording media; ELECTROCHEMISTRY
- Publication
PLoS ONE, 2013, Vol 8, Issue 8, p1
- ISSN
1932-6203
- Publication type
Article
- DOI
10.1371/journal.pone.0073083