Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleEffect of nitrogen content on nanostructure and mechanical properties of TiC<sub>x</sub>N<sub>y</sub> thin films.AuthorsWang, J P; Lu, Y H; Shen, Y GPublicationSurface Engineering, 2011, Vol 27, Issue 3, p169ISSN0267-0844Publication typeArticleDOI10.1179/026708410X12459349720178