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- Title
Analysis of recoil force during Nd:YAG laser ablation of silicon.
- Authors
Lee, D. J.; Jeong, S. H.
- Abstract
Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400-μm-thick and 13-mm-long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 1011 W/cm2, the recoil pressure reached a value of over 40×109 Pa.
- Subjects
LASER ablation; SILICON; LASER welding; PULSED laser deposition; VACUUM; LASER beams
- Publication
Applied Physics A: Materials Science & Processing, 2004, Vol 79, Issue 4-6, p1341
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-004-2767-y