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- Title
Multislice imaging of integrated circuits by precession X-ray ptychography.
- Authors
Shimomura, Kei; Hirose, Makoto; Takahashi, Yukio
- Abstract
A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a twolayered circuit with a ~1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at ~10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.
- Subjects
INTEGRATED circuits; X-ray equipment
- Publication
Acta Crystallographica. Section A, Foundations & Advances, 2018, Vol 74, Issue 1, p66
- ISSN
2053-2733
- Publication type
Article
- DOI
10.1107/S205327331701525X