Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMonitoring of plasma processes by OES.Authorsv. Fragstein, Friederike; Schmachtenberg, Ernst; Hegenbart, AndreasPublicationVakuum in Forschung und Praxis, 2007, Vol 19, Issue S1, p39ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200790042