Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleProdukte/Verfahren - Vakuum in Forschung und Praxis 3/2006.PublicationVakuum in Forschung und Praxis, 2006, Vol 18, Issue 3, p40ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200690038