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Accurate polarization control in nonorthogonal two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional scale gratings.
- Published in:
- Optical Engineering, 2019, v. 58, n. 9, p. 092611-1, doi. 10.1117/1.OE.58.9.092611
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- Article
An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation.
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- Sensors (14248220), 2021, v. 21, n. 2, p. 670, doi. 10.3390/s21020670
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- Publication type:
- Article
Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors.
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- Sensors (14248220), 2019, v. 19, n. 23, p. 5289, doi. 10.3390/s19235289
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- Article
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions.
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- Sensors (14248220), 2018, v. 18, n. 2, p. 398, doi. 10.3390/s18020398
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- Publication type:
- Article
An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope.
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- International Journal of Advanced Manufacturing Technology, 2021, v. 117, n. 9/10, p. 2883, doi. 10.1007/s00170-021-07879-6
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- Article
Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network.
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- Nanomanufacturing & Metrology, 2023, v. 6, n. 1, p. 1, doi. 10.1007/s41871-023-00206-5
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- Article
Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors.
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- 2022
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- Publication type:
- Correction Notice
Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors.
- Published in:
- Nanomanufacturing & Metrology, 2021, v. 4, n. 1, p. 53, doi. 10.1007/s41871-020-00091-2
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- Article
Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement.
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- Nanomanufacturing & Metrology, 2020, v. 3, n. 4, p. 282, doi. 10.1007/s41871-020-00084-1
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- Article
A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser.
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- Nanomanufacturing & Metrology, 2019, v. 2, n. 4, p. 187, doi. 10.1007/s41871-019-00052-4
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- Publication type:
- Article
Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning.
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- Nanomanufacturing & Metrology, 2019, v. 2, n. 3, p. 131, doi. 10.1007/s41871-019-00040-8
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- Publication type:
- Article
A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor.
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- Nanomanufacturing & Metrology, 2019, v. 2, n. 2, p. 100, doi. 10.1007/s41871-019-00037-3
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- Publication type:
- Article
Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder.
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- Nanomanufacturing & Metrology, 2019, v. 2, n. 2, p. 111, doi. 10.1007/s41871-019-00039-1
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- Publication type:
- Article
Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface.
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- Nanomanufacturing & Metrology, 2018, v. 1, n. 1, p. 45, doi. 10.1007/s41871-018-0007-x
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- Publication type:
- Article
Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder.
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- International Journal of Automation Technology, 2024, v. 18, n. 2, p. 249, doi. 10.20965/ijat.2024.p0249
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- Publication type:
- Article
Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser.
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- International Journal of Automation Technology, 2024, v. 18, n. 1, p. 84, doi. 10.20965/ijat.2024.p0084
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- Publication type:
- Article
On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor.
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- International Journal of Automation Technology, 2024, v. 18, n. 1, p. 4, doi. 10.20965/ijat.2024.p0004
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- Publication type:
- Article
Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction.
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- International Journal of Automation Technology, 2022, v. 16, n. 5, p. 572, doi. 10.20965/ijat.2022.p0572
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- Publication type:
- Article
Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source.
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- International Journal of Automation Technology, 2021, v. 15, n. 4, p. 529, doi. 10.20965/ijat.2021.p0529
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- Publication type:
- Article
Fabrication of a Two-Dimensional Diffraction Grating with Isolated Photoresist Pattern Structures.
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- International Journal of Automation Technology, 2020, v. 14, n. 4, p. 546, doi. 10.20965/ijat.2020.p0546
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- Publication type:
- Article
A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool.
- Published in:
- Machines, 2021, v. 9, n. 11, p. 271, doi. 10.3390/machines9110271
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- Article
Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals.
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- Applied Sciences (2076-3417), 2023, v. 13, n. 2, p. 996, doi. 10.3390/app13020996
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- Article
A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser.
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- Applied Sciences (2076-3417), 2022, v. 12, n. 10, p. 5211, doi. 10.3390/app12105211
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- Publication type:
- Article
Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser.
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- Applied Sciences (2076-3417), 2022, v. 12, n. 9, p. N.PAG, doi. 10.3390/app12094736
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- Publication type:
- Article
Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe.
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- Applied Sciences (2076-3417), 2022, v. 12, n. 7, p. 3702, doi. 10.3390/app12073702
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- Publication type:
- Article
In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser.
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- Applied Sciences (2076-3417), 2021, v. 11, n. 17, p. 8028, doi. 10.3390/app11178028
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- Publication type:
- Article
Improvement of a Stitching Operation in the Stitching Linear-Scan Method for Measurement of Cylinders in a Small Dimension.
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- Applied Sciences (2076-3417), 2021, v. 11, n. 10, p. 4705, doi. 10.3390/app11104705
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- Publication type:
- Article
An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe.
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- Applied Sciences (2076-3417), 2020, v. 10, n. 20, p. 7235, doi. 10.3390/app10207235
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- Publication type:
- Article
High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact.
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- Applied Sciences (2076-3417), 2020, v. 10, n. 14, p. 4799, doi. 10.3390/app10144799
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- Publication type:
- Article
Measurement Uncertainty Analysis of a Stitching Linear-Scan Method for the Evaluation of Roundness of Small Cylinders.
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- Applied Sciences (2076-3417), 2020, v. 10, n. 14, p. 4750, doi. 10.3390/app10144750
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- Publication type:
- Article
Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser.
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- Applied Sciences (2076-3417), 2020, v. 10, n. 11, p. 4047, doi. 10.3390/app10114047
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- Publication type:
- Article
Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source.
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- Applied Sciences (2076-3417), 2019, v. 9, n. 19, p. 4084, doi. 10.3390/app9194084
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- Article
An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser.
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- Sensors (14248220), 2024, v. 24, n. 9, p. 2869, doi. 10.3390/s24092869
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- Publication type:
- Article
Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser.
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- Sensors (14248220), 2024, v. 24, n. 2, p. 370, doi. 10.3390/s24020370
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- Article
Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser.
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- Sensors (14248220), 2023, v. 23, n. 10, p. 4953, doi. 10.3390/s23104953
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- Publication type:
- Article
Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z -Directional Measuring Range.
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- Sensors (14248220), 2022, v. 22, n. 23, p. 9563, doi. 10.3390/s22239563
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- Publication type:
- Article
Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer.
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- Sensors (14248220), 2022, v. 22, n. 23, p. 9348, doi. 10.3390/s22239348
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- Publication type:
- Article
A New Optical Configuration for the Surface Encoder with an Expanded Z -Directional Measuring Range.
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- Sensors (14248220), 2022, v. 22, n. 8, p. N.PAG, doi. 10.3390/s22083010
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- Publication type:
- Article
A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer.
- Published in:
- Sensors (14248220), 2021, v. 21, n. 21, p. 7412, doi. 10.3390/s21217412
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- Publication type:
- Article
A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe.
- Published in:
- Applied Sciences (2076-3417), 2019, v. 9, n. 3, p. 454, doi. 10.3390/app9030454
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- Publication type:
- Article
Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration.
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- Applied Sciences (2076-3417), 2018, v. 8, n. 12, p. 2539, doi. 10.3390/app8122539
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- Publication type:
- Article