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- Title
Large-Aperture Real-Time Compensated Collimating Wavefront Error Detection Method.
- Authors
Zhu, Xueliang; Wang, Dasen; Nie, Fengming; Liu, Bingcai; Wang, Hongjun; Tian, Ailing
- Abstract
This paper proposes a real-time compensated pentaprism scanning wavefront detection method to achieve real-time compensation for scanning errors occurring during prism movement along a guide rail. The method is based on existing pentaprism scanning wavefront detection technology and it is realized by applying self-collimation-based three-dimensional error compensation. Using theoretical and data analyses of a detection experiment, the reliability of the optimized pentaprism scanning detection method is verified, thus effectively ensuring the reasonable estimation of the interferometry surface measurement uncertainty.
- Subjects
ERROR detection (Information theory); OPTICAL measurements; INTERFEROMETRY; DATA analysis; WAGES; THREE-dimensional display systems
- Publication
Applied Sciences (2076-3417), 2019, Vol 9, Issue 11, p2370
- ISSN
2076-3417
- Publication type
Article
- DOI
10.3390/app9112370