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- Title
Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor.
- Authors
Sun, Xiaopeng; Zhou, Xin; Yu, Lei; He, Kaixuan; Xiao, Dingbang; Wu, Xuezhong
- Abstract
This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reaches 710 k, proving to be a record in silicon disk resonators. Meanwhile, a small initial frequency split of the order-3 working modes endows the resonator with great potential for microelectromechanical systems (MEMS) gyroscopes application. Moreover, the experimental quality factor of resonators with different beam widths and relevant temperature experiment indicate that the dominating damping mechanism of the multiple folded-beam disk resonator is no longer thermoelastic damping.
- Subjects
QUALITY factor; MEMS resonators; RESONATORS; MICROELECTROMECHANICAL systems; SILICON crystals; ELECTROMECHANICAL technology; SINGLE crystals
- Publication
Micromachines, 2022, Vol 13, Issue 9, p1468
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi13091468