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- Title
Spark Plasma Sintering of SmS-Based Ceramic Targets for the Magnetron Sputtering.
- Authors
Akhmedov, A. K.; Abduev, A. Kh.; Asvarov, A. Sh.; Muslimov, A. E.; Kanevsky, V. M.
- Abstract
The results of studying the electric-spark plasma sintering of samarium monosulfide ceramics are presented. The dependence of the microstructure and phase composition of ceramics on the temperature of spark plasma sintering is studied on the basis of the data of scanning electron microscopy, energy dispersion X-ray microanalysis, and powder X-ray diffraction of synthesized samples. It is shown that a dense, nonporous ceramics, the phase composition of which is close to the composition of the initial powder, is formed at a sintering temperature of 1200°C.
- Subjects
MAGNETRON sputtering; SINTERING; X-ray powder diffraction; X-ray microanalysis; SCANNING electron microscopy; PLASMA temperature
- Publication
Technical Physics Letters, 2019, Vol 45, Issue 8, p773
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785019080030