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- Title
Phenomenological Approach to the Breakdown Phenomena in Radio-Frequency Microdischarges.
- Authors
Radmilović-Radjenović, M.; Radjenović, B.
- Abstract
This paper contains a simple theoretical prediction of the electrical breakdown characteristics of the rf capacitive plasma source. The Kihara equation has been applied in order to determine the breakdown voltage in helium rf microdischarges. It was found that the Kihara equation, with modified molecular constants, describes the breakdown process well even for gaps of the order of a few millimeters. The agreement between theory and the available experimental data over a wide range of parameters verifies the correctness of the approach. In addition, theoretically determined breakdown voltages involving gas-adjustable parameters are supported by the PIC/MCC simulation results.
- Subjects
PHENOMENOLOGICAL theory (Physics); ELECTRIC breakdown; RADIO frequency discharges; ELECTRIC capacity; PLASMA gases; BAND gaps; SIMULATION methods &; models
- Publication
International Review of Physics, 2009, Vol 3, Issue 3, p161
- ISSN
1971-680X
- Publication type
Article