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- Title
半导体用大尺寸单晶金刚石衬底制备及 加工研究现状.
- Authors
刘俊杰; 关春龙; 易 剑; 宋 惠; 江 南; 西村一仁
- Abstract
Single crystal diamond has ultra-wide band gap, low dielectric constant, high breakdown voltage, high thermal conductivity, high intrinsic electron and hole mobility, and excellent radiation resistance, making it the most promising wide band gap high temperature semiconductor material known so far, known as the "ultimate semiconductor". However, there are still many technical problems to be solved in the large-scale application of single crystal diamond on semiconductors. This paper focuses on the chemical vapor deposition synthesis, stripping section and grinding and polishing technology of large size (inch) single crystal diamond substrates. By sorting out the relevant literature in recent years, the related research status at home and abroad are reviewed. On this basis, the preparation, stripping, grinding and polishing of single crystal diamond semiconductor materials in the future are prospected.
- Subjects
HEAT resistant materials; DIAMOND crystals; SINGLE crystals; BREAKDOWN voltage; CHEMICAL vapor deposition
- Publication
Journal of Synthetic Crystals, 2023, Vol 52, Issue 10, p1733
- ISSN
1000-985X
- Publication type
Article