Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleSilver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure.AuthorsHasselmann, Tim; Misimi, Bujamin; Boysen, Nils; Zanders, David; Wree, Jan‐Lucas; Rogalla, Detlef; Haeger, Tobias; Zimmermann, Florian; Brinkmann, Kai Oliver; Schädler, Sebastian; Theirich, Detlef; Heiderhoff, Ralf; Devi, Anjana; Riedl, ThomasPublicationAdvanced Materials Technologies, 2023, Vol 8, Issue 1, p1ISSN2365-709XPublication typeArticleDOI10.1002/admt.202200796