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- Title
Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO<sub>2</sub> Nanoparticles.
- Authors
Panfilov, V. I.; Pugachevskii, M. A.; Kuzmenko, A. P.; Dobromyslov, M. B.
- Abstract
The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.
- Subjects
PARTICLE size distribution; SUBSTRATES (Materials science); TEMPERATURE effect; PHASE transitions; HAFNIUM oxide; METAL nanoparticles
- Publication
Journal of Nano- & Electronic Physics, 2015, Vol 7, Issue 4, p04099-1
- ISSN
2077-6772
- Publication type
Article