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- Title
Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning.
- Authors
Jeon, Jurim; Kim, Yangjin; Sugita, Naohiko
- Abstract
Phase-calculation formula, involving a window and Fourier transform term, have been used for decades to profile the shape of sample surfaces. Windows can be designed using the phase-calculation polynomial theory to eliminate various types of phase errors. Here, we discuss the phase errors calculated by the phase-calculation formulas, comprising the windows and Fourier transform terms, by considering not only the linear error of the phase modulation but also the combined error between the higher harmonics and linear error of the phase modulation. The surface topography of a 4-inch wafer was also profiled using phase-calculation formulas for the various types of windows and a Fizeau-type interferometer. We also discuss the repeatability of the phase errors calculated using phase-calculation formulas.
- Subjects
SURFACE topography; PHASE modulation; WAVELENGTHS; FOURIER transforms; INTERFEROMETERS
- Publication
Journal of Mechanical Science & Technology, 2023, Vol 37, Issue 9, p4809
- ISSN
1738-494X
- Publication type
Article
- DOI
10.1007/s12206-023-0833-7