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- Title
An All Oxide-Based Imperceptible Thin-Film Transistor with Humidity Sensing Properties.
- Authors
Kyung Su Kim; Cheol Hyoun Ahn; Won Jun Kang; Sung Woon Cho; Sung Hyeon Jung; Dae Ho Yoon; Hyung Koun Cho
- Abstract
We have examined the effects of oxygen content and thickness in sputtered InSnO (ITO) electrodes, especially for the application of imperceptible amorphous-InGaZnO (a-IGZO) thin-film transistors (TFTs) in humidity sensors. The imperceptible a-IGZO TFT with 50-nm ITO electrodes deposited at Ar:O2 = 29:0.3 exhibited good electrical performances with Vth of −0.23 V, SS of 0.34 V/dec, µFE of 7.86 cm2/V∙s, on/off ratio of 8.8 × 107, and has no degradation for bending stress up to a 3.5-mm curvature. The imperceptible oxide TFT sensors showed the highest sensitivity for the low and wide gate bias of −1~2 V under a wide range of relative humidity (40–90%) at drain voltage 1 V, resulting in low power consumption by the sensors. Exposure to water vapor led to a negative shift in the threshold voltage (or current enhancement), and an increase in relative humidity induced continuous threshold voltage shift. In particular, compared to conventional resistor-type sensors, the imperceptible oxide TFT sensors exhibited extremely high sensitivity from a current amplification of >103.
- Subjects
NITROSO compounds; THIN films; TRANSISTORS; ELECTRONIC equipment; DETECTORS
- Publication
Materials (1996-1944), 2017, Vol 10, Issue 5, p530
- ISSN
1996-1944
- Publication type
Article
- DOI
10.3390/ma10050530