Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFabrication of InGaN thin-film transistors using pulsed sputtering deposition.AuthorsItoh, Takeki; Kobayashi, Atsushi; Ueno, Kohei; Ohta, Jitsuo; Fujioka, HiroshiPublicationScientific Reports, 2016, p29500ISSN2045-2322Publication typeArticleDOI10.1038/srep29500