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- Title
Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing.
- Authors
Parriaux, Olivier; Jourlin, Yves
- Abstract
Controlled translational displacement between a large-surface photosensitive planar substrate and a wide and short 1D grating phase-mask enables the printing of large-width, spatially highly coherent gratings of principally unlimited length, using a limited number of opto-mechanical control parameters. The phase-mask is illuminated by a temporally modulated exposure light sheet controlled by a displacement sensor. The proposed method is compared with existing techniques, and its functional elements and their combination are analyzed.
- Subjects
PHOTOSENSITIVE glass; SUBSTRATES (Materials science); OPTICAL gratings; OPTICAL engineering; DIFFRACTION gratings; PHOTOLITHOGRAPHY
- Publication
Advanced Optical Technologies, 2018, Vol 7, Issue 4, p249
- ISSN
2192-8576
- Publication type
Article
- DOI
10.1515/aot-2018-0017