Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAbsolute Populations of Argon Metastable States in an RF Discharge Plasma.AuthorsBaısova, B. T.; Strunin, V. I.; Strunina, N. N.; Khudaıbergenov, G. Zh.AbstractAbsolute populations of argon metastable states in the plasma of an rf discharge in pure argon and an argon-silane mixture are determined.SubjectsPLASMA gases; ELECTRIC discharges; ARGONPublicationTechnical Physics, 2003, Vol 48, Issue 8, p969ISSN1063-7842Publication typeArticleDOI10.1134/1.1607491