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- Title
Thin Film Diamond Advances the Semiconductor Industry.
- Authors
Hickey, Diane P.; Kane, Neil; Carlisle, John
- Abstract
The article focuses on the development and proliferation of thin film diamond in the semiconductor industry. It notes that working on diamond is difficult due to its low supply and expensive value. Its ability to harness diamond for semiconductor is considered tough. Its thermal transport properties are well recognized and are vital in solving nodes' temperature issues. Microelectromechanical systems (MEMS) is notable as one of the killer applications for thin and smooth diamond.
- Subjects
DIAMONDS; THIN films; THERMAL properties of semiconductors; MICROELECTROMECHANICAL systems; ELECTROMECHANICAL devices; SEMICONDUCTOR industry
- Publication
Advanced Materials & Processes, 2010, Vol 168, Issue 5, p56
- ISSN
0882-7958
- Publication type
Article