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- Title
Defects in intrinsic and pseudodoped amorphous hydrated silicon.
- Authors
Golikova, O. A.
- Abstract
The data on the dark conductivity and photoconductivity of a-Si:H films obtained by various methods in the soft-deposition regime are presented. It is shown that, regardless of the substrate temperature, the material obtained in this regime is intrinsic. Deviation from the softdeposition regime results in the growth of pseudodoped a-Si:H, with an increased density of defects (dangling Si-Si bonds) and with inhomogeneous structure. The defects in intrinsic and pseudodoped a-Si:H are found, respectively, in D[sup 0] and D[sup +] states.
- Subjects
SILICON; PHOTOCONDUCTIVITY; HYDRATION
- Publication
Semiconductors, 1997, Vol 31, Issue 3, p228
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/1.1187117