Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleP‐9: Reduction and Mechanism of ESD Defect in IGZO‐TFT Formation.AuthorsLiu, Tianzhen; Duan, Xianxue; Xu, Dezhi; Cui, Haifeng; Zhang, Zhihai; Youn, YangSik; Chen, Junsheng; Lee, SeungKyuPublicationSID Symposium Digest of Technical Papers, 2019, Vol 50, Issue 1, p1245ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.13158