We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
A desktop extreme ultraviolet microscope based on a compact laser-plasma light source.
- Authors
Wachulak, P.; Torrisi, A.; Bartnik, A.; Węgrzyński, Ł.; Fok, T.; Fiedorowicz, H.
- Abstract
A compact, desktop size microscope, based on laser-plasma source and equipped with reflective condenser and diffractive Fresnel zone plate objective, operating in the extreme ultraviolet (EUV) region at the wavelength of 13.8 nm, was developed. The microscope is capable of capturing magnified images of objects with 95-nm full-pitch spatial resolution (48 nm 25-75% KE) and exposure time as low as a few seconds, combining reasonable acquisition conditions with stand-alone desktop footprint. Such EUV microscope can be regarded as a complementary imaging tool to already existing, well-established ones. Details about the microscope, characterization, resolution estimation and real sample images are presented and discussed.
- Subjects
LASER-plasma interactions; ULTRAVIOLET microscopy; FRESNEL diffraction; OPTICAL resolution; LASER plasmas
- Publication
Applied Physics B: Lasers & Optics, 2017, Vol 123, Issue 1, p1
- ISSN
0946-2171
- Publication type
Article
- DOI
10.1007/s00340-016-6595-5