Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTagungen: Vakuum in Forschung und Praxis 5/2019.PublicationVakuum in Forschung und Praxis, 2019, Vol 31, Issue 5, p44ISSN0947-076XPublication typeArticleDOI10.1002/vipr.201970505