Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleVIPs - Vakuum in Forschung und Praxis 4/2005.PublicationVakuum in Forschung und Praxis, 2005, Vol 17, Issue 4, p223ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200590051