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- Title
Light collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron microscopy.
- Authors
Filippov, M. N.; Rau, E. I.; Sennov, R. A.; Boyde, A.; Howell, R. G. T.
- Abstract
Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to light losses transport in the optical part of the detector. A model is proposed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for various designs are presented.
- Publication
Scanning, 2001, Vol 23, Issue 5, p305
- ISSN
0161-0457
- Publication type
Article
- DOI
10.1002/sca.4950230503