Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleEnhancement of the dielectric constant of Ta2O5 through substitution with TiO2.AuthorsCava, R.F.; Peck Jr., W.F.AbstractIllustrates that the dielectric constant of tantalum oxide Ta2O5 can be increased by nearly a factor of four by the addition of eight percent titanium oxide TiO2. Implications to microelectronic applications.SubjectsTANTALUM; MICROELECTRONICSPublicationNature, 1995, Vol 377, Issue 6546, p215ISSN0028-0836Publication typeArticleDOI10.1038/377215a0