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- Title
Direct-imaging DOEs for high-NA multi-spot confocal microscopy.
- Authors
Li, Zheng; Taphanel, Miro; Längle, Thomas; Beyerer, Jürgen
- Abstract
Diffractive lens arrays with overlapping apertures can produce spots with high numerical apertures (NAs). Such diffractive optical elements (DOEs) can replace high-NA objectives and measure a large area with high resolution in transmission microscopes. However, in reflection microscopes for surface measurements, the axial resolution is still limited by the objectives. Direct-imaging DOEs are proposed to solve the problem. They can perform high-NA multi-spot measurement in reflection configurations in both lateral and axial directions. Experiments demonstrate a lateral non-vanishing contrast up to 1448 lp/mm and an axial response on a plane mirror with a full width at half maximum (FWHM) of 2.24 μm.
- Subjects
CONFOCAL microscopy; MIRRORS; NUMERICAL apertures
- Publication
Technisches Messen, 2020, Vol 87, ps40
- ISSN
0171-8096
- Publication type
Article
- DOI
10.1515/teme-2020-0017