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- Title
Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism.
- Authors
Jiang, Bo; Dong, Yiming; Zhang, Zijie; Li, Xiangyu; Wei, Yuxuan; Guo, Yifan; Liu, Haixia
- Abstract
In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study.
- Subjects
NANOPOSITIONING systems; OPTIMIZATION algorithms; SYNCHROTRON radiation; ANGLES; FINITE element method; LEGAL motions; NANOTECHNOLOGY
- Publication
Applied Sciences (2076-3417), 2024, Vol 14, Issue 9, p3756
- ISSN
2076-3417
- Publication type
Article
- DOI
10.3390/app14093756