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- Title
Designing of a MOEMS Gyroscope Based on an Asymmetric-Grating Hybrid-Plasmonic ROC.
- Authors
Gholinejad, Jalal; Abedi, Kambiz
- Abstract
This article introduces a double-sided vibrating MOEMS gyroscope which uses a readout circuit with a novel technique based on an asymmetric Au grating. The proposed asymmetric grating has an innovative structure, as well as the hybrid surface plasmon polariton (SPP) mechanism is suggested for the first time in this device. Modeling and simulations are performed using numerical studies aimed at achieving low dimensions, high sensitivity, and broad measurement range. The provided gyroscope has a measurement range of ± 11460 °/s, a mechanical sensitivity of 0.2671 nm/°/s , an optical sensitivity of 1.9066 μW/°/s, a total sensitivity of 0.7626 μA/°/s, and a resolution of 52.449 μ°/s. Moreover, the characteristics of a proof mass of 0.2543 μg, an operational wavelength of λ = 630 nm , a bandwidth of 1.496 kHz , and a measurement time of 1 ms are obtained.
- Subjects
GYROSCOPES; POLARITONS; AUTOMATIC timers
- Publication
Arabian Journal for Science & Engineering (Springer Science & Business Media B.V. ), 2023, Vol 48, Issue 11, p15003
- ISSN
2193-567X
- Publication type
Article
- DOI
10.1007/s13369-023-07868-9