Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleEffect of Nitridation Rate on the Composition and Conductivity of Titanium Nitride Films Prepared from Sol-Gel Titania.AuthorsKeddie, Joseph L.; Li, Jian; Mayer, James W.; Giannelis, Emmanuel P.PublicationJournal of the American Ceramic Society, 1991, Vol 74, Issue 11, p2937ISSN0002-7820Publication typeArticleDOI10.1111/j.1151-2916.1991.tb06869.x