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- Title
Interface Engineering and Direct Bonding of Lithium Tantalate Crystals.
- Authors
TORCHINSKY, ILYA; ROSENMAN, GIL
- Abstract
A method for modifying the surface free energy of lithium tantalate (LT) ferroelectric crystals is reported. Ultraviolet illumination and low-energy electron irradiation have been used for tuning the surface free energy (wettability) resulting in a wide range of contact angles (6 deg to 87 deg). The ultraviolet (UV) illumination makes the LT crystal surface superhydrophilic while the low-energy electron irradiation decreases the surface wetting. Fabrication of various wetting configurations allows demonstration of high-quality direct bonding of LT plates with hydrophilic polar faces.
- Subjects
SURFACE energy; LITHIUM tantalate; FERROELECTRIC crystals; ULTRAVIOLET radiation; SEALING (Technology); SURFACES (Technology)
- Publication
Journal of Electronic Materials, 2008, Vol 37, Issue 10, p1547
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-008-0508-2