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- Title
On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment.
- Authors
Poletkin, Kirill
- Abstract
This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.
- Subjects
MUTUAL inductance; DEGREES of freedom; LEVITATION; MICROACTUATORS; ACTUATORS
- Publication
Actuators, 2021, Vol 10, Issue 10, p256
- ISSN
2076-0825
- Publication type
Article
- DOI
10.3390/act10100256