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- Title
The formation and study of sensor thin layers based on zirconium and rare earth metal (Ce, Y, and Tb) oxides and the preparation of metal-oxide-semiconductor structures based on them.
- Authors
Arsent'ev, M.; Kalinina, M.; Tikhonov, P.; Morozova, L.; Egorova, T.; Shilova, O.
- Abstract
Low-temperature synthetic methods (the molecular layering and pyrolysis of a liquid aerosol) for the nanostructured oxide films for the gas sensors based on zirconium dioxides and rare earth element (Ce, Y, and Tb) oxides sensitive to the oxygen-impoverished media and ozone have been suggested. It has been shown that the films based on the CeO-ZrO and TbO-YO systems possess the largest sensitivity and a strong response rate (5-6 s) to the reducing media (CO + CO), while the film sensors based on CeO, to ozone. Metal-oxide-semiconductor (MOS) structures that find wide application in semiconductor microelectronics have been obtained based on the synthesized films of rare earth element oxides.
- Subjects
ELECTROCHEMICAL sensors; RARE earth oxide thin films; SPECTRUM analysis; ZIRCONIUM; ZIRCONIUM metallurgy; RARE earth metal metallurgy
- Publication
Glass Physics & Chemistry, 2014, Vol 40, Issue 6, p629
- ISSN
1087-6596
- Publication type
Article
- DOI
10.1134/S1087659614060029