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- Title
Experimental study on machining germanium wafer with ice particle, fixed abrasive tools.
- Authors
Yu, Ze; Sun, Yuli; Zhang, Guiguan; Lu, Wenzhuang; Zuo, Dunwen
- Abstract
A novel ice particle-fixed abrasive tool (IPFAT) was designed and manufactured in this paper. The uniformity of abrasives distribution in the IPFAT was tested. Using three kinds of IPFAT, which contains α-Al2O3 particles whose mean particle sizes are 5 μm, 1.289 μm, and 0.328 μm respectively; single crystal germanium wafers were lapped and then polished. The results show that the distribution of abrasives in the IPFAT is uniform and the IPFAT has the ability of self-sharpening. With the increased lap and polishing time, the surface roughness of the single crystal germanium wafers decreases linearly and the materials remove rate (MRR) basically remains invariable. After polishing with a 0.328 μm α-Al2O3 IPFAT, the surface roughness of the single crystal germanium wafer is 85 nm within 500 μm × 500 μm and the surface is even without obvious undulation.
- Subjects
GERMANIUM; ABRASIVES; SINGLE crystals; ICE; SURFACE roughness; WATER jet cutting; SILICON solar cells
- Publication
International Journal of Advanced Manufacturing Technology, 2021, Vol 115, Issue 9/10, p3225
- ISSN
0268-3768
- Publication type
Article
- DOI
10.1007/s00170-021-07352-4