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- Title
Proton-beam writing channel based on an electrostatic accelerator.
- Authors
Lapin, A.; Rebrov, V.; Kolin'ko, S.; Salivon, V.; Ponomarev, A.
- Abstract
We have described the structure of the proton-beam writing channel as a continuation of a nuclear scanning microprobe channel. The problem of the accuracy of positioning a probe by constructing a new high-frequency electrostatic scanning system has been solved. Special attention has been paid to designing the probe-forming system and its various configurations have been considered. The probe-forming system that best corresponds to the conditions of the lithographic process has been found based on solving the problem of optimizing proton beam formation. A system for controlling beam scanning using multifunctional module of integrated programmable logic systems has been developed.
- Subjects
PROTON beams; ELECTROSTATIC accelerators; MICROPROBE analysis; LITHOGRAPHY; PROGRAMMABLE logic devices
- Publication
Technical Physics, 2016, Vol 61, Issue 9, p1411
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784216090140