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- Title
MEMS Actuators for Optical Microendoscopy.
- Authors
Qiu, Zhen; Piyawattanametha, Wibool
- Abstract
Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today's challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail.
- Subjects
MICROACTUATORS; ENDOSCOPY; OPTICAL coherence tomography; OPTICAL images; FLUORESCENCE; MICROSCOPY; IMAGE registration
- Publication
Micromachines, 2019, Vol 10, Issue 2, p85
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi10020085