We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Tip-Based Nanofabrication for ScalableManufacturing.
- Authors
Huan Hu; Hoe Joon Kim; Suhas Somnath
- Abstract
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
- Subjects
NANOFABRICATION; TECHNOLOGICAL innovations; NANOMANUFACTURING
- Publication
Micromachines, 2017, Vol 8, Issue 3, p90
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi8030090