Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleDepth profiling of micrometer-order area by mesa-structure fabrication.AuthorsSeki, S.; Tamura, H.; Wada, Y.; Tsutsui, K.; Ootomo, S.PublicationSurface & Interface Analysis: SIA, 2011, Vol 43, Issue 1/2, p154ISSN0142-2421Publication typeArticleDOI10.1002/sia.3546