Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.Title3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition.AuthorsBurch, Matthew J.; Ievlev, Anton; Kim, Songkil; Belianinov, Alex; Ovchinnikova, Olga S.; Stanford, Michael G.; Mahady, Kyle; Lewis, Brett B.; Fowlkes, Jason D.; Rack, Philip D.AbstractThe article offers information on the fabrication of complex 3D nanoscale structures using focused ion beam induced deposition (FIBID) in a Helium Ion Microscope (HIM).SubjectsFOCUSED ion beams; ION bombardment; ION beams; NANOSTRUCTURES; MATERIALS science; NANOSTRUCTURED materials; HELIUM ionsPublicationMicroscopy & Microanalysis, 2019, p332ISSN1431-9276Publication typeArticleDOI10.1017/S1431927618002155