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- Title
2-D OF NANO PHOTONIC SILICON FABRICATION FOR SENSING APPLICATION.
- Authors
HASSAN, M. M.; FAKHRI, M. A.
- Abstract
Porous silicon (n-PS) with diverse morphologies was prepared on silicon (Si) substrate via photo-electrochemical etching technique. We studies the structure, surface morphology, pore diameter, roughness, based on (XRD), (AFM), (SEM) at different etching time (5, 10 min) and current (10mA/cm²). In this present work we fabricate the nanophotonic Porous Silicon (PS) by the Electro photo Chemical etching method. The nanophotonic PS results show a Nano structure and the reduction of the reflection in order to improve the light conversion for optoelectronics and higher band-gap obtained from Photoluminescence (PL) analysis.
- Subjects
PHOTOELECTROCHEMICAL etching; POROUS silicon; SILICON; ETCHING techniques; SURFACE morphology; PHOTOLUMINESCENCE measurement; NANOSILICON; PHOTOLUMINESCENCE
- Publication
Digest Journal of Nanomaterials & Biostructures (DJNB), 2019, Vol 14, Issue 4, p873
- ISSN
1842-3582
- Publication type
Article