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- Title
Investigations of the inductively coupled argon plasma sputtering of PbSnTe ternary solid solution.
- Authors
Amirov, I.; Zimin, S.; Gorlachev, E.; Naumov, V.; Abramof, E.; Rappl, P.
- Abstract
Investigations of the sputtering of films of the PbSnTe ternary solid solution with 0 ≤ x ≤ 1 in RF high-density low-pressure inductively coupled argon plasma have been performed. The effect of a constant sputtering rate with variation in the composition of the semiconductor solid solution for (111)-oriented films with x < 0.6 and of a sputtering rate decrease with the appearance of (100)-oriented crystallites at x > 0.6 is found. The results are analyzed in the context of a model of ternary alloy sputtering based on the Sigmund solid sputtering theory when taking into account the sublimation energies of binary compounds that constitute a solid solution.
- Publication
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2012, Vol 6, Issue 4, p643
- ISSN
1027-4510
- Publication type
Article
- DOI
10.1134/S102745101208006X