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- Title
On the Pulsed-Laser Deposition of Bismuth-Telluride Thin Films on Polyimide Substrates.
- Authors
Shupenev, A. E.; Korshunov, I. S.; Grigoryants, A. G.
- Abstract
The peculiarities of obtaining p-Bi0.5Sb1.5Te3 and n-Bi2Te2.7Se0.3 thin thermoelectric films with a thickness of about 300 nm grown on a polyimide substrate by the pulsed-laser-deposition method are reported. The influence of the growth temperature, pressure and target-to-substrate distance on the film's thermoelectric properties is investigated. Thermoelectric p- and n-type films exhibit a high Seebeck coefficient of 220 and –200 μV/K and low electrical power factors of 9.7 and 5.0 μW/(cm K2) respectively due to the relatively high electrical resistances of the films.
- Subjects
THERMOELECTRIC generators; THIN film deposition; POLYIMIDE films; SEEBECK coefficient; THIN films
- Publication
Semiconductors, 2020, Vol 54, Issue 3, p378
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/S1063782620030173