Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleInfluence of RF Bias on the Deposition of CrN Studied by OES.AuthorsZhang, Z. G.; Rapaud, O.; Bonasso, N.; Mercs, D.; Dong, C.; Coddet, C.PublicationAdvanced Engineering Materials, 2008, Vol 10, Issue 7, p628ISSN1438-1656Publication typeArticleDOI10.1002/adem.200800053