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Title
Team provides OPC-defect printability test reticle.
Abstract
Reports that MicroUnity Systems Engineering, Photronics, Applied Materials and Benchmark Technologies have developed a special reticle to test printability of different types of OPC mask defects. Description of each company's role in the reticle development; Technology required to design and manufacture high quality OPC masks; Comment by Steve Carlson vice president of technology for Photronics.