Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleInhalt: Vakuum in Forschung und Praxis 2/2015.PublicationVakuum in Forschung und Praxis, 2015, Vol 27, Issue 2, p4ISSN0947-076XPublication typeArticleDOI10.1002/vipr.201590018