Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFachverband Vakuumphysik und Vakuumtechnik.AuthorsJitschin, WolfgangPublicationVakuum in Forschung und Praxis, 2006, Vol 18, Issue 3, p46ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200690041