Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleDie Entwicklung der Turbomolekularpumpe.AuthorsHenning, JörgenPublicationVakuum in Forschung und Praxis, 1991, Vol 3, Issue 1, p28ISSN0947-076XPublication typeArticleDOI10.1002/vipr.2230030108